光学器件的微型化和集成化是当前研究的热点，其中利用微纳结构实现局域电磁改性的超构光学更是引人关注。本文从微纳结构的制备出发，总结了利用超衍射精密加工的飞秒激光直写技术，制备偏振转换器件和几何相位器件的工作。介绍了微纳结构改性的物理机制，飞秒激光直写光刻胶、飞秒激光烧蚀金属薄膜、飞秒激光诱导纳米光栅等手段在偏振转换器件和几何相位器件制备方面的进展，展望了飞秒激光微纳加工技术在超构光学器件制备方面的挑战。

A 400 nm femtosecond laser was used to ablate the surface of a high-pressure and high-temperature diamond, and subwavelength surface micro structures with a period of 100 nm were achieved. A variety of micro-nano composite surface structures were prepared by changing the polarization direction and laser scanning direction. By dynamically adjusting the laser polarization and the laser scanning tracks, a maskless direct writing fabrication of micro-nano complex structures was realized. The micro-nano patterning on an ultra-hard and super-stabile diamond provides a new idea for the preparation of friction reducing surfaces, nano imprint transfer templates, surface enhanced Raman scattering test substrates, and micro-nano optical structures.